Moldnano offers semi-customized/standard NIL hardmasters for gratings in different sizes.

1. Binary gratings   

Pitch > 100 nm; Width > 50 nm; Height < 500 nm

2. Slanted gratings

Pitch > 150 nm; Width > 100 nm; Height < 500 nm; Slant Angle < 45°

3. Blazed gratings

Sub-micron period; Arbitrary angle; Arbitrary duty cycle

4. 2D gratings

Sub-micron period;Arbitrary angle; Arbitrary duty cycle

5. Depth modulated gratings

Linear and nonlinear gradual depth modulation; Modulation range: ＜100 nm at one area